Spin Coater EZ4S
- 5 Spin programs with 5 steps for each program;
- Wafer size: 10 mm to 4'' (100 mm);
- Anodic oxidation aluminum shell;
- Anti-blockage spindle design for easy maintenance;
- Easy to clean the spin bowl which is removable.
Safety and Reliability
- Compact size;
- Vacuum interlock;
- Hinged spin bowl lid design.
- Removable spin bowl;
- Solvent resistant transparent lid;
- Chemical resistant spin bowl.
- Intuitive LCD;
- Can program up to 5 recipes and 5 steps each recipe.
- Semiconductor process;
- Coating process;