Spin Coater EZ4S

General Feature

• 5 Spin programs with 5 steps for each program;
• Wafer size: 10 mm to 4'' (100 mm);
• Anodic oxidation aluminum shell;
• Anti-blockage spindle design for easy maintenance;
• Easy to clean the spin bowl which is removable.

Safety and Reliability 

• Compact size;
• Vacuum interlock;
• Hinged spin bowl lid design.

Chemical Compatibility 

• Removable spin bowl;
• Solvent resistant transparent lid;
• Chemical resistant spin bowl.

Programable Mode

• Intuitive LCD;
• Can program up to 5 recipes and 5 steps each recipe.

Typical Applications

• Semiconductor process;
• Patterning;
• Coating process;
• Photolithography.