Spin Coater - EZ4-S (Lebo Science, China)

Spin Coater - EZ4-S (Lebo Science, China)

Description: EZ4-S is a high performance compact spin coater. It is designed for high uniformity thin material coatings. With its small footprint, the spin coater can be installed in a fume hood or a glove box. The upgraded program can store up to five recipes and each recipe could be edited with five spin steps.
Specifications:
Spin speed range: 100-9999 RPM
Acceleration range: 100-9999 rpm/s
Maximum step time: 3000 s
Wafer size: 10 mm to 4'' (100 mm)